Metrological Step Height Verification for Cluster Processed Amorphous Substrates
Step height verification on cluster-processed amorphous substrates requires guardbanded metrology and tip-force or dispersion compensation to prevent yield loss.
ISO 5436-1
Artifact Classification
Technical specifications for the categorization and calibration of measurement standards used in surface texture analysis govern the design of physical artifacts like step heights and grooves. Implementing iso 5436-1 allows labs to verify the vertical magnification and linearity of profilometers by using certified reference materials. These standards provide a universal bridge between the physical geometry of a board and the digital reading on a screen.
The document defines five distinct types of material standards, ranging from wide grooves for stylus checks to fine grids for lateral resolution testing, ensuring that every function of the metrology tool is verified against a known physical constant.
Calibration Specimen
Different types of artifacts address specific aspects of instrument performance. Type A standards represent a single step used for height calibration, whereas Type C standards feature a repeated periodic profile for checking horizontal displacement. Each specimen must have its own certificate of calibration that links the local measurement back to the primary international unit of length.
Measurement Method
Evaluation involves calculating the mean height of two reference planes on either side of a feature. The software calculates the distance between these planes to determine the step height. This standardized calculation ensures that two different labs measuring the same copper trace will arrive at a result that is comparable and valid within the specified uncertainty.